Overview and Introduction New Trends in Engineering and Science: Micro- and Nanoscale Systems Introduction to Design of MEMS and NEMS Biological and Biosystems Analogies Overview of Nano- and Microelectromechanical Systems Applications of Micro- and Nanoelectromechanical Systems Micro- and Nanoelectromechanical Systems Synergetic Paradigms in MEMS MEMS and NEMS Architecture Fundamentals of MEMS Fabrication Introduction and Description of Basic Processes Microfabrication and Micromachining of ICs, Microstructures, and Microdevices Devising and Synthesis of MEMS AND NEMS MEMS Motion Microdevices Classifier and Synthesis Nanoelectromechanical Systems Modeling of Micro- and Nanoscale Electromechanical Systems, Devices, and Structures Introduction to Modeling, Analysis, and Simulation Electromagnetics and its Application for MEMS and NEMS Induction Micromachines Synchronous Microtransducers Microscale Permanent-Magnet Stepper Micromotors Piezotransducers Fundamentals of Modeling of Electromagnetic Radiating Energy Microdevices Classical Mechanics and its Application Thermoanalysis and Heat Equation Nanosystems, Quantum Mechanics, and Mathematical Models Atomic Structures and Quantum Mechanics Molecular and Nanostructure Dynamics Molecular Wires and Molecular Circuits Control of Microelectromechanical Systems Introduction to Microelectromechanical Systems Control Lyapunov Stability Theory Control of Microelectromechanical Systems Intelligent Control of MEMS Hamilton-Jacobi Theory and Quantum Mechanics Case Studies: Synthesis, Analysis, Fabrication, and Computer-Aided Design of MEMS Introduction Design and Fabrication Analysis of Translational Microtransducers Single-Phase Reluctance Micromotors: Modeling, Analysis, and Control Three-Phase Synchronous Reluctance Micromotors Microfabrication Magnetization Dynamics of Thin Films Microstructures and Microtransducers With Permanent Magnets: Micromirror Actuators Reluctance Electromagnetic Micromotors Micromachined Polycrystalline Silicon Carbide Micromotors Axial Electromagnetic Micromotors Synergetic Computer-Aided Design of MEMS Index Each chapter also includes a References section. Keywords: Nanoscience, Nanotechnology.