1 Introduction 1 2 Theory 7 2.1 Basicprinciplesofholography. 7 2.1.1 Classicholography . 8 2.1.2 Fourierholography .

10 2.1.3 Digitalholography . 12 2.1.4 Computergeneratedholograms . 12 2.1.

5 Numerical reconstruction of digital holograms . 14 2.2 Phasesshiftingreconstructionmethods . 15 2.2.1 Temporalphaseshiftingmethod. 16 2.2.

2 Spatialphaseshiftingtechniques . 18 2.3 Numeric propagation of the complex object wave . 20 2.3.1 Digitalholographicmicroscopy . 21 2.4 BeneFits of the Partially Spatial Coherence for DHM .

23 2.4.1 SpatialFrequencyFiltering . 23 2.4.2 MultipleReectionRemoval. 27 2.5 Typesofspatiallightmodulators .

29 2.5.1 Dierentmethodsofaddressing . 29 2.5.2 Digital micromirror devices and liquid crystal SLMs . 30 2.5.

3 Light modulators as holographic elements . 32 2.6 Micromanipulationwithlight . 34 2.6.1 Observationofthemomentum. 35 2.6.

2 Geometric optical explanation -Mie regime . 37 2.6.3 Wave optical analysis -Rayleigh regime . 39 2.6.4 Features and inuences of optical traps . 39 2.

6.5 Algorithms for generating optical trap patterns in Fourier plane 42 2.6.6 Calibrationofthetrapforces . 43 2.7 Dynamic holography for optical micromanipulation . 44 2.8 Applicationsofopticaltweezers .

46 2.9 Diractive and non-diractive beam types . 46 2.9.1 Gaussianbeams. 47 2.9.2 Besselbeams .

48 2.9.3 Superpositionofbesselbeams. 51 2.9.4 Laguerre. 56 2.9.

5 Mathieubeams . 57 2.9.6 Airybeams . 59 2.10 Direct laser writing with two-photon polymerization . 60 3 State of the art 63 3.1 Systemsforopticaltraps.

63 3.2 Imaging by means of digital holographic quantitative phase contrast methods. 64 3.3 Directlaserwritinglithography . 65 3.4 Multifunctional combined microscopy systems . 67 3.5 OverviewofHOT-systemsinresearch.

67 4 Experimental investigations 69 4.0.1 Introduction -Objectives and JustiFications . 69 4.1 Subsequent digital holographic focussing . 70 4.1.1 Autofocus strategies and application to phase distributions .

70 4.1.2 Haltonsampling . 74 4.1.3 Experimentalinvestigations . 76 4.2 Digital Holographic Microscopy with partially coherent light sources .

78 4.2.1 Optical Setups and Digital Holographic Reconstruction . 79 4.2.2 CoherentNoiseRemoval. 80 4.2.

3 Experimental Demonstrations and Applications . 81 BiomedicalApplications . 81 StudyofCellCultures . 81 4.2.4 Adaptionofreconstructionmethods. 82 Reconstruction with consideration of spectrum . 83 Experimentalinvestigations .

85 4.2.5 Tayloringofcoherencelength . 88< 4.3 Application of atomic force microscopy in NMM-1 as reference system . 93 4.3.1 Introduction.

94 4.3.2 Propertiesofapplieddevices. 95 Nanopositioning and nanomeasuring machine . 95 Integration of AFM-sensor into the NMM-1 . 96 4.3.3 Calibration .

97 Demands . 97 Nano-andmicroroughness. 98 Measurementstrategy . 99 Correctionofverticaldrift. 99 4.3.4 Experimentalresults .103 Measurements on calibration gratings .

103 Applicationonopticalsurfaces .105 4.4 SimulationanddesignofHOTsetups.107 4.4.1 SystemRequirements.107 4.4.

2 Considerationsonopticaldesign. 108 4.4.3 Investigations on experimental optical system . 110 Moduleforopticaltweezers .111 Digital holographic phase contrast microscopy . 115 Overallsystem .115 4.

4.4 Opticalsimulationwithraytracing . 118 4.4.5 Optical properties of the calculated system . 118 Tolerance analysis and sensitivity of optical setup . 120 4.4.

6 Optomechanicalsetup .122 4.5 CharacterizationoftheSLM.124 4.5.1 Calibrationoflinearphaseshift . 125 4.5.

2 Correction of the system inherent wavefront aberrations . 127 4.5.3 Addressing and reconstruction of holograms . 129 4.6 Characterizationoftheoverallsystem . 131 4.6.

1 Wavefront based system optimization . 131 4.6.2 Generation of variable intensity patterns in the object plane . 134 4.6.3 Micromanipulation of microspheres . 135 4.

6.4 Determinationofthetrapforce . 137 4.6.5 Imaging of biological cells using quantitative phase-contrast . 138 4.6.6 Conclusionsandoutlook.

139 4.7 Integrationinnanopositioningsystem . 141 4.7.1 Nano coordinate measuring machine . 142 4.7.2 Experimental investigations on sensor integration .

142 4.8 Realisation and illustration of beam conFigurations . 143 4.8.1 Bessel .144 4.8.2 Mathieu.

145 4.8.3 Laguerre.149 4.8.4 Airy .150 4.9 Application of trapping patterns and optical torque .

151 4.10HOT-DHM-combination .153 4.11 Direct laser writing with modiFied HOT-setup . 164.