Introduction and General Considerations Fundamentals of Chemical Vapor Deposition The Chemistry of CVD Metallo-Organic CVD (MOCVD) CVD Processes and Equipment The CVD of Metals The CVD of the Allotropes of Carbon The CVD of Non-Metallic Elements The CVD of Ceramic Materials: Carbides The CVD of Ceramic Materials: Nitrides The CVD of Ceramic Materials: Oxides The CVD of Ceramic Materials: Borides, Silicides, III-V Compounds and II-VI Compounds (Chalcogenides) CVD in Electronic Applications: Semiconductors CVD in Electronic Applications: Conductors, Insulators, and Diffusion Barriers CVD in Optoelectronic and Ferroelectric Applications CVD in Optical Applications CVD in Wear- and Corrosion-Resistant Applications CVD in Cutting-Tool Applications CVD in Fiber, Powder, and Monolithic Applications Conversion Guide Appendix: Alternative Processes for Thin-Film Deposition and Surface Modification Index.