Optical Micro- And Nanometrology in Microsystems Technology : 5-7 April 2006, Strasbourg, France
Optical Micro- And Nanometrology in Microsystems Technology : 5-7 April 2006, Strasbourg, France
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Author(s): Gorecki, Christophe
Osten, Wolfgang
ISBN No.: 9780819462442
Pages: 512
Year: 200604
Format: Other
Price: $ 184.50
Dispatch delay: Dispatched between 7 to 15 days
Status: Available

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.


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