About the Author xiii Foreword xv Preface xvii 1 Foundation of the Aspheric Optical Polishing Technology 1 1.1 Advantages and Application of Aspheric Optics 1 1.1.1 Advantages of Optical Aspherics 1 1.1.2 The Application of Aspheric Optical Components in Military Equipment 2 1.1.3 The Aspheric Optical Components in the Civilian Equipment 2 1.
2 The Characteristics of Manufacturing Aspheric Mirror 3 1.2.1 Requirements of Modern Optical System on Manufacturing Aspheric Parts 3 1.2.2 The Processing Analysis of Aspheric Optical Parts 7 1.3 The Manufacturing Technology for Ultra-Smooth Surface 9 1.3.1 Super-Smooth Surface and Its Applications 9 1.
3.2 Manufacturing Technology Overview of Super-Smooth Surface 11 1.3.3 Manufacturing Technology of Ultra-Smooth Surface Based on the Mechanical Micro-Cutting Principles 12 1.3.4 The Traditional Abrasive Polishing Technology for Ultra-Smooth Surface 13 1.3.5 The Principles and Methods of Non-contact Ultra-Smooth Polishing 15 1.
3.6 The Non-contact Chemical Mechanical Polishing (CMP) 17 1.3.7 The Magnetic Field Effect Auxiliary Processing Technology 17 1.3.8 The Particle Flowing Machining Technology 18 1.4 The Advanced Aspheric Optical Polishing Technology 19 1.4.
1 The Classic Polishing for Aspheric Optical Parts 19 1.4.2 The Modern CNC Polishing Method of Aspheric Optical Parts 20 1.4.3 The Controllable Compliant Tool (CTT) Manufacturing Technology for Aspheric Optical Components 22 1.5 The CCT Based on Elasticity Theory 28 1.5.1 The Controlled Elastic Deformation Pad Polishing--Stressed-Lap Polishing (SLP) 29 1.
5.2 The Controlled Mirror Body Elastic Deformation Polishing by Active Support 29 1.5.3 Bonnet Polishing with Precession Process 30 1.6 The Key Basic Theory of CCT Technology Based on the Multi-Energy Field 30 1.6.1 The Material Removal Mechanism and Mathematical Model 31 1.6.
2 The Multi-Parameter Control Strategy 32 1.6.3 4D CNC Technology 34 1.6.4 The Evolution Theory and Control Technology of the Errors 36 1.6.5 The Equipment and Technology of the CCT 40 References 41 2 The Basic Theory of Aspheric Optical Lapping and Polishing Technology 45 2.1 The Preston Equation of Optical-Mechanical Polishing Technology and Its Application 45 2.
1.1 The Preston Equation 45 2.1.2 The Application of Preston Equation in the Traditional Polishing 47 2.2 The Deterministic Processing Principle for Aspheric 49 2.3 The Molding Theory of Aspheric Surface Processing 51 2.3.1 The Dual-Series Model for the Aspheric Molding Process 51 2.
3.2 The Influence of the Removal Function Size on the Processing 53 2.3.3 The Influence of Removal Function Disturbing 55 2.3.4 The Influence of the Positioning Errors 59 2.3.5 The Influence of Discrete Interval 60 2.
4 The Figuring Theory of Linear Scanning Mode on Full-Aperture 63 2.4.1 The Iterative Algorithm Based on Bayesian 64 2.4.2 The Pulse Iterative Method 72 2.4.3 The Truncated Singular Value Decomposition 73 2.5 The Polar Scanning Mode of Surface Figuring 76 2.
5.1 The Removal Function with Approximate Rotation Symmetry Property 76 2.5.2 The Removal Function without the Characteristics of Rotation Symmetry 78 2.6 The Frequency Domain Analysis of Forming 83 2.6.1 The Characteristics of the Spectrum Under the General Forming Conditions 84 2.6.
2 The Figuring Ability of the Rotary Symmetric Removal Function 86 2.7 Maximum Entropy Principle of Polishing 87 2.7.1 The Entropy Principle Expression for Polishing 88 2.7.2 An Application Example of the Principle of Maximum Entropy in the Fixed Eccentric Flat Polishing 89 2.7.3 The Example of Processing Parameter Choice Based on Maximum Entropy Principle for Dual-Rotor Pad 92 2.
7.4 The Example of Inhibition Medium and High Frequency Errors Based on the Entropy Increase Principle for the MRF 96 Appendix 2.A Two-Dimensional Hermite Series 102 Appendix 2.B Two-Dimensional Fourier Series 104 Appendix 2.C The Dual-Series Model Solution of Dwell Time 106 Appendix 2.D The Error Analysis of the Dual-Series Model Solution for Dwell Time 108 References 109 3 CCOS Technology Based on Small Polishing Pad 113 3.1 Review of CCOS Technology Based on Small Polishing Pad 113 3.1.
1 Progress of Small Tool CCOS Technology 113 3.1.2 Key Problems of Small Tool CCOS Technology 115 3.2 Aspheric Optical Compound Machining Tool Optical Aspherical Mirror Process Machine Tool 118 3.3 Modeling and Analysis of Removal Function 120 3.3.1 Characteristics of Ideal Removal Function 120 3.3.
2 Theoretical Model 121 3.3.3 Experimental Model 122 3.3.4 Figuring Ability Analysis of Removal Function 124 3.3.5 Modeling and Analysis of the Complex Shape Polishing Pad''s Removal Function 128 3.4 Calculation and Analysis of Dwell Time in CCOS Technology 136 3.
4.1 Pulse Iterative Method Based on Process Time 136 3.4.2 Influence of Convolution Effect on Residual Error 138 3.5 Removal Function Modeling Under the Edge Effect 147 3.5.1 Pressure Distribution When the Polishing Pad Out of Edge 148 3.5.
2 Removal Function Modeling Under Edge Effect 152 3.6 Cause and Modification Method of Optical Surface Small-Scale Manufacturing Error 157 3.6.1 Cause and Evaluation of Optical Surface Small-Scale Manufacturing Error 157 3.6.2 Full Aperture Uniform Polishing Correction Method of Small-Scale Manufacturing Error 159 3.6.3 Deterministic Local Modification Method of Small-Scale Manufacturing Error 173 References 176 4 Ion Beam Figuring Technology 179 4.
1 Outline of Ion Beam Figuring Technology 179 4.1.1 Application of Ion Beam Processing Technology 179 4.1.2 The Basic Mechanism and Character for Optical Machining by IBF 181 4.1.3 Development of IBF of Optical Mirror 183 4.2 Basic Principle of IBF for Optical Mirror 185 4.
2.1 Description of Ion Sputter Process 185 4.2.2 Material Removal Rate of IBF 188 4.3 Analysis of Removal Function Model in IBF 199 4.3.1 Theoretical Modeling of Removal Function in IBF 199 4.3.
2 Experiment Analysis of the Removal Function Character in IBF 203 4.3.3 Experiment Modeling of Removal Function in IBF 208 4.4 IBF System Design and Analysis 210 4.4.1 System Set-Up 210 4.4.2 System Analysis 213 4.
5 Micro-Scale Error Evolution During IBF 222 4.5.1 Surface Roughness Evolution 222 4.5.2 Microscopic Morphology Evolution 223 4.6 The Polishing Experiment of IBF 230 4.6.1 Flat Optical Mirror Polishing Experiment 230 4.
6.2 Curved Surface Figuring Experiment 232 References 235 5 Magnetorheological Figuring 237 5.1 Overview of Magnetorheological Figuring 237 5.1.1 Applications of Magnetorheological Fluid 237 5.1.2 Development of Magnetic-Effect-Assisted Polishing Techniques for Optics 239 5.1.
3 Development of Deterministic Magnetorheological Figuring 240 5.2 Mechanism and Mathematical Model of MRF Material Removal 244 5.2.1 Mechanism of MRF Material Removal 244 5.2.2 Theoretical Calculation of Load on Single Abrasive and Indentation Depth 245 5.2.3 Fluid Dynamics Analysis and Calculation in Polishing 247 5.
3 MRF Machine Tools 257 5.3.1 Basic Requirement on MRF Machine Structure 257 5.3.2 Machine Structure of MRF Experimental Prototype 258 5.3.3 Design of Upside Down MRF Polishing Devices 259 5.3.
4 MR Fluid Circulation and Control System 263 5.4 MR Fluid and Its Performance 264 5.4.1 Current Situation of MR Fluid Research 264 5.4.2 Components of MR Fluid and Its Performance 265 5.4.3 Principles on Choosing MR Fluid Elements 269 5.
4.4 Preparation of MR Fluid 272 5.5 Optimization of MRF Processing Parameters 272 5.5.1 Orthogonal Experiments on MRF Process Parameters 273 5.5.2 Grey Correlation Analysis 276 5.5.
3 Parameter Optimization of Multiple Process Indexes 279 5.5.4 Comprehensive Optimization of Machining Process 280 5.6 MRF Optical Surfacing Technique and Machining Experiment 280 5.6.1 Algorithm of Dwell Time for Optical MRF Surfacing 280 5.6.2 MRF Polishing Examples 284 5.
7 Magnetorheological Jet Polishing 294 5.7.1 Overview of Abrasive Jet Polishing 294 5.7.2 MJP Experiment and Analysis 295 5.7.3 CFD Analysis on MJP Removal Mechanism 298 5.7.
4 MJP Polishing Experiments 303 References 304 6 Evaluation of Deterministic Optical Machining Errors 307 6.1 Introduction 307 6.2 Usual Evaluation Method of Optical Machining Errors 308 6.2.1 Evaluation Parameters of Geometrical Accuracy in Optical Machining Process 308 6.2.2 Evaluation Method of Optical Machining Errors Based on PSD Character Curve 310 6.2.
3 Evaluation Method of Optical Machining Errors Based on Scattering Theory 311 6.2.4 Evaluation Method of Optical Machining Errors Based on Statistical Optical Theory 311 6.3 Analysis on Distribution Characteristics of Optical Machining Errors 312 6.3.1 Evaluation and Analysis on Machining Errors of Any Direction on Optical Surface 312 6.3.2 Evaluation and Analysis of Local Errors on Optical Surface 319 6.
3.3 Influence of Processing Method on Optical Machining Errors 323 6.4 Scattering Evaluation of Optical Machining Errors 340 6.4.1 Binary Separa.