Foreword Preface Highlights and Chronological Developmental History of MEMS Devices Involving Nanotechnology Introduction What Is MEMS? Potential Applications of MEMS Devices in Commercial and Space Systems MEMS Technology for Military Systems Applications MEMS for Commercial, Industrial, Scientific, and Biomedical System Applications MEMS Technology for Hard-Disk Drives MEMS Devices for Uncooled Thermal Imaging Arrays and Cooled Focal Planar Arrays for Various Applications Applications of Nanotechnology in IR and Electro-Optical Sensors for Biometric and Security Applications MEMS Technology for Medical Applications MEMS Technology for Satellite Communications and Space Systems Applications MEMS Devices for Auto Industry Applications MEMS Technology for Aerospace System Applications Potential Actuation Mechanisms, Their Performance Capabilities, and Applications Introduction Classification of Actuation Mechanisms Structural Requirements and Performance Capabilities of Electrostatic Actuation Mechanism Piezoelectric Actuation Mechanism Electrothermal Actuation Mechanism Electromagnetic Actuation Mechanism Electrodynamic Actuation Mechanism Electrochemical Actuation Mechanism Latest and Unique Methods for Actuation Introduction Electrostatic Rotary Microactuator with Improved Shaped Design Unique Microactuator Design for HHD Applications Capabilities of Vertical Comb Array Microactuator Capabilities of Bent-Beam Electrothermal Actuators Packaging, Processing, and Material Requirements for MEMS Devices Introduction Packaging and Fabrication Materials Impact of Environments on MEMS Performance Material Requirements for Electrostatic Actuator Components Substrate Materials Best Suited for Various MEMS Devices RF-MEMS Switches Operating at Microwave and mm-Wave Frequencies Introduction Operating Principle and Critical Performance Parameters of MEMS Devices Performance Capabilities and Design Aspects of RF-MEMS Shunt Switches MEMS Shunt Switch Configuration for High Isolation MEMS Switches Using Metallic Membranes RF-MEMS Switches with Low-Actuation Voltage RF-MEMS Series Switches Effects of Packaging Environments on the Functionality and Reliability of the MEMS Switches Packaging Material Requirements for MEMS Switches RF/Microwave MEMS Phase Shifter Introduction Properties and Parameters of CPW Transmission Lines Distributed MEMS Transmission-Line Phase Shifters Design Aspects and DMTL Parameter Requirements for TTD Phase Shifters Operating at mm-Wave Frequencies Two-Bit MEMS DMTL Phase Shifter Designs Multi-Bit Digital Phase Shifter Operating at K and KaFrequencies Ultrawide Band Four-Bit True Time-Delay MEMS Phase Shifter Operating over dc-40 GHz Two-Bit, V-Band Reflection-Type MEMS Phase Shifter Three-Bit, Ultralow Loss Distributed Phase Shifter Operating over K-Band Frequencies Three-Bit, V-Band, Reflection-Type Distributed MEMS Phase Shifter Applications of Micropumps and Microfluidic Introduction Potential Applications of Micropumps Design Aspects of Fixed-Valve Micropumps Dynamic Modeling for Piezoelectric Valve-Free Micropumps Design Aspects and Performance Capabilities of an Electrohydrodynamic Ion-Drag Micropump Capabilities of a Ferrofluidic Magnetic Micropump Miscellaneous MEMS/Nanotechnology Devices and Sensors for Commercial and Military Applications Introduction MEMS Varactors or Tunable Capacitors Micromechanical Resonators Micromechanical Filters Transceivers Oscillator Using Micromechanical Resonator Technology V-Band MEMS-Based Tunable Band-Pass Filters MEMS-Based Strain Sensors MEMS Interferometric Accelerometers MEMS-Based Micro-Heat Pipes MEMS-Based Thin-Film Microbatteries Materials for MEMS- and Nanotechnology-Based Sensors and Devices Introduction Photonic Crystals Nanotechnology-Based Materials and Applications Nanoparticles Quantum Dots Nanobubbles MEMS Deformable Micro-Mirrors Carbon Nanotubes and CNT Arrays Nanotechnology- and MEMS-Based Sensors and Devices for Specific Applications Index A Summary and References appear at the end of each chapter. tion Mechanism Electromagnetic Actuation Mechanism Electrodynamic Actuation Mechanism Electrochemical Actuation Mechanism Latest and Unique Methods for Actuation Introduction Electrostatic Rotary Microactuator with Improved Shaped Design Unique Microactuator Design for HHD Applications Capabilities of Vertical Comb Array Microactuator Capabilities of Bent-Beam Electrothermal Actuators Packaging, Processing, and Material Requirements for MEMS Devices Introduction Packaging and Fabrication Materials Impact of Environments on MEMS Performance Material Requirements for Electrostatic Actuator Components Substrate Materials Best Suited for Various MEMS Devices RF-MEMS Switches Operating at Microwave and mm-Wave Frequencies Introduction Operating Principle and Critical Performance Parameters of MEMS Devices Performance Capabilities and Design Aspects of RF-MEMS Shunt Switches MEMS Shunt Switch Configuration for High Isolation MEMS Switches Using Metallic Membranes RF-MEMS Switches with Low-Actuation Voltage RF-MEMS Series Switches Effects of Packaging Environments on the Functionality and Reliability of the MEMS Switches Packaging Material Requirements for MEMS Switches RF/Microwave MEMS Phase Shifter Introduction Properties and Parameters of CPW Transmission Lines Distributed MEMS Transmission-Line Phase Shifters Design Aspects and DMTL Parameter Requirements for TTD Phase Shifters Operating at mm-Wave Frequencies Two-Bit MEMS DMTL Phase Shifter Designs Multi-Bit Digital Phase Shifter Operating at K and KaFrequencies Ultrawide Band Four-Bit True Time-Delay MEMS Phase Shifter Operating over dc-40 GHz Two-Bit, V-Band Reflection-Type MEMS Phase Shifter Three-Bit, Ultralow Loss Distributed Phase Shifter Operating over K-Band Frequencies Three-Bit, V-Band, Reflection-Type Distributed MEMS Phase Shifter Applications of Micropumps and Microfluidic Introduction Potential Applications of Micropumps Design Aspects of Fixed-Valve Micropumps Dynamic Modeling for Piezoelectric Valve-Free Micropumps Design Aspects and Performance Capabilities of an Electrohydrodynamic Ion-Drag Micropump Capabilities of a Ferrofluidic Magnetic Micropump Miscellaneous MEMS/Nanotechnology Devices and Sensors for Commercial and Military Applications Introduction MEMS Varactors or Tunable Capacitors Micromechanical Resonators Micromechanical Filters Transceivers Oscillator Using Micromechanical Resonator Technology V-Band MEMS-Based Tunable Band-Pass Filters MEMS-Based Strain Sensors MEMS Interferometric Accelerometers MEMS-Based Micro-Heat Pipes MEMS-Based Thin-Film Microbatteries Materials for MEMS- and Nanotechnology-Based Sensors and Devices Introduction Photonic Crystals Nanotechnology-Based Materials and Applications Nanoparticles Quantum Dots Nanobubbles MEMS Deformable Micro-Mirrors Carbon Nanotubes and CNT Arrays Nanotechnology- and MEMS-Based Sensors and Devices for Specific Applications Index A Summary and References appear at the end of each chapter. Operating Principle and Critical Performance Parameters of MEMS Devices Performance Capabilities and Design Aspects of RF-MEMS Shunt Switches MEMS Shunt Switch Configuration for High Isolation MEMS Switches Using Metallic Membranes RF-MEMS Switches with Low-Actuation Voltage RF-MEMS Series Switches Effects of Packaging Environments on the Functionality and Reliability of the MEMS Switches Packaging Material Requirements for MEMS Switches RF/Microwave MEMS Phase Shifter Introduction Properties and Parameters of CPW Transmission Lines Distributed MEMS Transmission-Line Phase Shifters Design Aspects and DMTL Parameter Requirements for TTD Phase Shifters Operating at mm-Wave Frequencies Two-Bit MEMS DMTL Phase Shifter Designs Multi-Bit Digital Phase Shifter Operating at K and KaFrequencies Ultrawide Band Four-Bit True Time-Delay MEMS Phase Shifter Operating over dc-40 GHz Two-Bit, V-Band Reflection-Type MEMS Phase Shifter Three-Bit, Ultralow Loss Distributed Phase Shifter Operating over K-Band Frequencies Three-Bit, V-Band, Reflection-Type Distributed MEMS Phase Shifter Applications of Micropumps and Microfluidic Introduction Potential Applications of Micropumps Design Aspects of Fixed-Valve Micropumps Dynamic Modeling for Piezoelectric Valve-Free Micropumps Design Aspects and Performance Capabilities of an Electrohydrodynamic Ion-Drag Micropump Capabilities of a Ferrofluidic Magnetic Micropump Miscellaneous MEMS/Nanotechnology Devices and Sensors for Commercial and Military Applications Introduction MEMS Varactors or Tunable Capacitors Micromechanical Resonators Micromechanical Filters Transceivers Oscillator Using Micromechanical Resonator Technology V-Ban.