Surface Metrology for Micro- and Nanofabrication
1. Noncontact Scanning Electrostatic Force Microscope 2. Quartz Tuning Fork Atomic Force Microscope 3. Micropipette Ball Probing System 4. Low-Force Elastic Beam Surface Profiler 5. Linear-Scan Micro Roundness Measuring Machine 6. Micro-Gear Measuring Machine 7. On-Machine Length Gauge Surface Profiler 8.
On-Machine Air-Bearing Surface Profiler 9. On-Machine Atomic Force Microscope 10. On-Machine Roll Profiler 11. In-Process Fast Tool Servo Profiler 12. Self-Calibration of Prove Tip Radius and Cutting Edge Sharpness.