This book deals with surface defects in wide-bandgap crystals of lithium fluoride, silicon dioxide, and zinc oxide. Encompassing topics such as radiation-induced amorphization, crystallization, and various microstructural developments arising from defect production and annealing, the book delves into controlled modifications of physical and chemical properties, micro and nano-structuring of surfaces, and the creation and behavior of structures far from thermal equilibrium, including supersaturated solid solutions, ion tracks, and surfaces treated with electron- and high-intensity ion beams. Beyond its relevance to the academic community, this monograph serves as a valuable resource for design and installation organizations, offering insights for specialists involved in the development of modern, new, and energy-efficient innovative materials. The applicability extends to traditional silicon energy and semiconductor electronics, providing practical knowledge for professionals engaged in these fields. Additionally, the work is of significance to a broad spectrum of specialists and managers in various organizations involved in the development of lithium-ion batteries for energy storage systems, especially those employing cutting-edge high-performance materials. As a comprehensive reference in materials science, this monograph caters to a diverse audience engaged in the ongoing advancements and applications within this dynamic field. It is suitable for scientific and engineering professionals, as well as researchers specializing in materials science, physics, semiconductors, photovoltaics, defects engineering, laser technology, solid-state physics, and beam-enhanced synthesis and modification of materials.