Microelectronic Fabrication

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1. An Overview of Microelectronic Fabrication. 2. Lithography. 3. Thermal Oxidation of Silicon. 4. Diffusion.

5. Ion Implantation. 6. Film Deposition. 7. Interconnections and Contacts. 8. Packaging and Yield.

9. MOS Process Integration. 10. Bipolar Process Integration.

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