Smart Sensor Basics -Introduction. Mechanical-Electronic Transitions in Sensing. Nature of Sensors. Integration of Micromachining and Microelectronics. Application Example. Summary.; Micromachining -Introduction. Bulk Micromachining.
Wafer Bonding. Surface Micromachining. Other Micromachining Techniques. Combining MEMS with IC Fabrication. Other Micromachined Materials. MEMS Foundry Services and Software Tools. Application Example. Summary.
; The Nature of Semiconductor Sensor Output -Introduction. Sensor Output Characteristics. Other Sensing Technologies. Digital Output Sensors. Noise/Interference Aspects. Low Power, Low Voltage Sensors. Analysis of Sensitivity Improvement. Application Example.
Summary.; Getting Sensor Information Into the Microcontroller -Introduction. Amplification and Signal Conditioning. Separate Versus Integrated Signal Conditioning. Digital Conversion. On-Line Tool for Evaluating a Sensor Interface Design. Application Example. Summary.
; Using MCUs/DSPs to Increase Sensor IQ -Introduction. MCU Control. MCUs for Sensor Interface. DSP Control. Techniques and Systems Considerations. Software, Tools, and Support. Sensor Integration. Application Example.
Summary.; Communications for Smart Sensors -Introduction. Background and Definitions. Sources (Organizations) and Standards. Automotive Protocols. Industrial Networks. Protocols in Other Applications. Protocols in Silicon.
Transitioning Between Protocols. Application Example. Summary.; Control Techniques -Introduction. State Machines. Fuzzy Logic. Neural Networks. Combined Fuzzy Logic and Neural Networks.
Adaptive Control. Other Control Areas. Impact of Artificial Intelligence. Application Example. Summary. ; Wireless Sensing -Introduction. Wireless Data and Communications. Wireless Sensing Networks.
Industrial Wireless Sensing Networks. RF Sensing. Telemetry. RF MEMS. Application Example. Summary.; MEMS Beyond Sensors -Introduction. MEMS Actuators.
Other Micromachined Structures. Application Example. Summary.; Packaging, Testing, and Reliability Implications of Smarter Sensors -Introduction. Semiconductor Packaging Applied to Sensors. Hybrid Packaging. Common Packaging for Sensors. Reliability Implications.
Testing Smarter Sensors. Application Example. Summary.; Mechatronics and Sensing Systems -Introduction. Smart-Power ICs. Embedded Sensing. Other System Aspects. Application Example.
Summary. ; Standards for Smart Sensing -Introduction. Setting the Standards for Smart Sensors and Systems. IEEE 1451.1. IEEE 1451.2. IEEE 1451.
3. IEEE 1451.4. IEEE 1451.5. IEEE P1451.6. IEEE 1451.
7. Extending the System to the Network. Application Example. Summary.; More Standards Impacting Sensors -Introduction. Sensor Plug and Play. Universal Serial Bus. Development Tools Establish De Facto Standards.
Alternate Standards. Consumer/Cell Phone Apps. Application Example. Summary.; Sensor Fusion -Introduction. Sensor and Other Fusion Background. Automotive Applications. Industrial (Robotic) Applications.
Consumer Applications. Application Example. Summary.; Energy Harvesting for Wireless Sensor Nodes -Introduction. Applications Drive Technology Implementation and Development. Complete System Consideration. EH Technologies. Energy Storage.
Energy Budget. Development Systems. Application Example. Summary.; The Next Phase of Sensing Systems -Introduction. Future Sensor Plus Semiconductor Capabilities. Future System Requirements. Software, Sensing, and the System.
Trusted Sensing. Alternate Views of Smart Sensing. The Smart Loop. Application Example. Summary.; Appendix. List of Web Sites for Additional Smart Sensor and MEMS Information. Selected Bibliography.
Smart Sensor Acronym Decoder and Glossary. About the Author. Index. ;.