Pressure Sensors Capacitive Pressure Sensors Structure Theory Experimental results Inductive Pressure Sensors Structure Theory Experimental results Sensor interface circuit Ultrahigh-Sensitivity Pressure Sensors Structure Theory Experimental Results Conclusion Quiz References Motion and Acceleration Sensors Ultrahigh-Sensitivity,Wide Dynamic Range Sensors Structure Theory Experimental Results Conclusion Other Motion and Acceleration Micro Sensors Quiz References Gas and Smoke Sensors A CO Gas Sensor based on Nanotechnology Structure Theory Assembly of the Sensor Experimental Results Auxiliary Experimental Results Conclusion Smoke Detectors Structure Qualitative Description of the Detector Theory Experimental Results Conclusion Quiz References Moisture Sensors Structure Theory Main Experimental Results Auxiliary Experimental Results Conclusion Quiz References Optoelectronic and Photonic Sensors Optoelectronic Microphone Introduction and Principle of Operation Theory Description of the Image Acquisition / Pattern Recognition Hardware and Software Experimental Results Conclusion Other Optoelectronic and Photonic Micro Sensors Quiz References Biological, Chemical, and "Lab on a Chip" Sensors "Lab on a Chip" Sensors Other Bio-Chemical Micro and Nano Sensors Quiz References Electric, Magnetic, and RF / Microwave Sensors Magnetic Field Sensors Introduction and Principle of Operation Theory Manufacturing and Assembly of the Prototype Sensor Numerical Data and Experimental Results Conclusion Other Important Electromagnetic / RF Micro and Nano Sensors Quiz References Integrated Sensor / Actuator Units and Special Purpose Sensors Aircraft Icing Detectors Introduction and Principle of Operation Theory Performance Data and Experimental Results Conclusion Microfluidic, Micro-Actuators, and Other Special Purpose Small-Scale Devices Quiz References.